Study on Power Durability of Ti-Containing Al Surface Acoustic Wave Electrodes, Using Interdigitated Interdigital Transducer Filters

概要

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The power durability of Al-0.6 wt%Ti electrodes in 900 MHz interdigitated interdigital transducer surface acoustic wave (IIDT SAW) filters was investigated through accelerated time-to-failure (TF) tests in relation to grain sizes and annealing, and was further compared with that of pure Al, Al-0.5 wt%Pd and conventional Al-1.1 wt%Cu electrodes. TF of the Al-0.6 wt%Ti electrodes in the IIDT filter is increased by reducing the average grain size and the standard deviation of the grain size. Annealing of Al-0.6 wt%Ti film, however, results in increase of the average grain size and decrease of TF. TF of Al-0.6 wt%Ti electrodes was the largest:much larger than that of Al-0.5 wt%Pd electrodes, having almost the same grain size and standard deviation as Al-0.6 wt%Ti electrodes, and nine times as large as that of Al-1.1 wt%Cu electrodes.
社団法人応用物理学会の論文
1995-05-30