Highly Reliable Silicon Nitride Thin Films Made by Jet Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-02-28
著者
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Cui Guan-ji
Jet Process Corporation
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Wang Xie-wen
Yale University, Center for Microelectronic Materials & Structures, and Department of Electrical Eng
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Ma Tso-Ping
Yale University, Center for Microelectronic Materials & Structures, and Department of Electrical Eng
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Tamagawa Takashi
Jet Process Corporation
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Golz John
Jet Process Corporation
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Karechi Simon
Jet Process Corporation
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Halpern Bret
Jet Process Corporation
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Schimitt Jerome
Jet Process Corporation
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Ma Tso-ping
Yale University Center For Microelectronic Materials & Structures And Department Of Electrical E
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Wang Xie-wen
Yale University Center For Microelectronic Materials & Structures And Department Of Electrical E