Experimental Verification of an Aerial Image Evaluation Method and Its Application to Studies of Attenuated Phase-Shifting Masks
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1995-12-30
著者
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Sugawara Minoru
Mos Lsi Division Sony Corporation
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SHIMIZU Hideo
ULSI R&D Laboratories, Semiconductor Company, Sony Corporation
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UESAWA Fumikatsu
ULSI R&D Laboratories, Sony Corporation
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ODA Tatsuji
ULSI R&D Laboratories, Sony Corporation
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Oda T
Hiroshima Kokusai Gakuin Univ. Hiroshima Jpn
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Uesawa Fumikatsu
Ulsi R&d Laboratories Sony Corporation
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Shimizu Hideo
Ulsi R&d Laboratories Sony Corporation
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Shimizu Hideo
Ulsi R&d Laboratories Semiconductor Company Sony Corporation
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ODA Tatsuji
ULSI R&D Laboratories, Sony Corporation
関連論文
- New Systematic Evaluation Method for Attenuated Phase-Shifting Mask Specifications
- Experimental Verification of an Aerial Image Evaluation Method and Its Application to Studies of Attenuated Phase-Shifting Masks