Dosage Control for Scanning Exposure with Pulsed Energy Fluctuation and Exposed Position Jitter

概要

論文の詳細を見る
Techniques of dosage control for scanning exposure are introduced and the accuracy of exposure dose achieved by these techniques are discussed. Analytical formulation of the dosage accuracy is performed for the first time under consideration of both pulsed energy fluctuation and exposed position jitter. Actual dosage accuracy was measured by adopting the simplest method. Experimental data from the exposure apparatus are shown and the effectiveness of derived formula for dosage error estimation is confirmed. Application for the exposure system is also discussed.
社団法人応用物理学会の論文
1995-12-30