Discharges in a Magnetron-Type Cold Cathode Ion Gun for the Sputter Etching Apparatus
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1979-01-05
著者
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YAMADA Takashi
Faculty of Science and Engineering, Konan University
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Yoshida Kentaro
Faculty Of Engineering Kobe University
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Yamada Takashi
Faculty Of Engineering Kobe University
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Yamada Takashi
Faculty Of Engineering Hiroshima University
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- Discharges in a Magnetron-Type Cold Cathode Ion Gun for the Sputter Etching Apparatus
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