Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans : LATE NEWS

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1983-02-28

著者

• Ishiwara H.

  Graduate School Of Science And Engineering Tokyo Institute Of Technology

• YAMAMOTO H.

  Graduate School of Engineering, Mie University

• NAKANO M.

  Graduate School of Science and Engineering, Tokyo Institute of Technology

• FURUKAWA S.

  Graduate School of Science and Engineering, Tokyo Institute of Technology

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• Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans : LATE NEWS

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