Synthesis of Epitaxial TiO_2 Thin Films on MgO(100) Using a Combination of an Oxygen-Radical Beam and a Tetra-isopropoxy Titanium Molecular Beam
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概要
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We synthesized epitaxial titanium oxide thin films on MgO (100) using a combination of a metalorganic pulsed molecular beam and an oxygen-radical beam. At temperatures below 350℃, titanium oxide (TiO_2) thin films were exclusively deposited only when an oxygen-radical beam was irradiated along with Ti(i-OC_3H_7)_4. Above this temperature, TiO_2 thin films were deposited both in the presence and absence of the oxygen-radical beam; however, the oxygen-radical beam enhanced the deposition rate as well as the crystallinity of the titanium oxide thin films.
- 社団法人応用物理学会の論文
- 1999-01-15
著者
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Watanabe Shigeyuki
Institute Of Materials Science University Of Tukuba
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Watanabe Shigeyuki
Institute Of Clinical Medicine University Of Tsukuba
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KATSURA Kazumasa
Institute of Materials Science, University of Tukuba
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NOZOYE Hisakazu
Institute of Materials Science, University of Tukuba
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Nozoye Hisakazu
Institute Of Materials Science University Of Tukuba:national Institute Of Materials And Chemical Res
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Katsura Kazumasa
Institute Of Materials Science University Of Tukuba
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