Micromachined Photodiode Submount with Integrated Mirro for Efficient Out-of-Plane Coupling to Planar Polymeric Waveguide Circuits

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概要

• 論文の詳細を見る

• We report on a hybrid coupling concept which allows high-density integration of top illuminated photodetector arrays with planar polymeric waveguide circuits by means of a micromachined submount with an integrated mirror. The etching of a complementary alignment structure in the polymeric layer stack allows passive assembly. The fabrication process of the submount structure is described, focusing on the optimization of the mirrorig facet surface quality in order to reduce the effect of topographic scattering. A prototype 8-channel detector module integrated with a straight polymeric waveguide array exhibited an average coupling efficiency of -6.1 dB and a cross-talk value of -21.3 dB between adjacent channels at 1300 nm.

• 社団法人応用物理学会の論文
• 1998-06-30

著者

• Diemeer Mart

  University Of Gent

• Van Der

  University Of Gent

• Van Daele

  Akzo Nobel Central Research Rge Department

• De Dobbelaere

  Imec Information Technology Department

• DE DOBBELAERE

  IMEC, Information Technology Department

• Van Der

  University Hospital Maastricht

• Linden Johan

  University of Gent

• Dobbelaere Peter

  IMEC, Information Technology Department

• Daele Peter

  AKZO NOBEL Central Research, RGE Department

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