Novel Fabrication Process of Freestanding Metallic Microstructures Using Double Electroplating

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-12-30

著者

• Baek C‐w

  Seoul National Univ. Seoul Kor

• Baek Chang-wook

  Laboratory For Micro Sensors And Actuators School Of Electrical And Computer Engineering Seoul Natio

• Kim Yong-kweon

  Laboratory For Micro Sensors And Actuators

関連論文

• Novel Micromachined Coplanar Waveguide Transmission Lines for Application in Millimeter-Wave Circuits
• A Surface-Bulk-Micromachined Electromagnetic Gyroscope Operating at Atmospheric Pressure
• Novel Fabrication Process of Freestanding Metallic Microstructures Using Double Electroplating
• Novel Fabrication Process of Freestanding Metallic Microstructures Using Double Electroplating

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