Thermal Distortion of an X-Ray Mask for Synchrotron Radiation Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-12-30
著者
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Yang Jinfeng
Laboratory For Quantum Equipment Technology Sumitomo Heavy Industries Ltd.
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TOYOTA Eijiro
Laboratory for Quantum Equipment Technology, Sumitomo Heavy Industries, Ltd.
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KAWACHI Shunichi
Laboratory for Quantum Equipment Technology, Sumitomo Heavy Industries, Ltd.
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Toyota Eijiro
Laboratory For Quantum Equipment Technology Sumitomo Heavy Industries Ltd.
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Kawachi Shunichi
Laboratory For Quantum Equipment Technology Sumitomo Heavy Industries Ltd.