Co/Pt Disks with a Simplified Structure

概要

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Potentially low cost Co/Pt multilayer disks were fabricated using a simplified disk structure. Ultrathin seed layers of dielectrics were used to enhance the coercivity and squareness of the Kerr hysteresis loop. Both Co/Pt superlattices and the dielectrics were deposited under low vacuum. The total cycle time consisting of loading the PC substrate into the vacuum chamber, pumping the sputtering chamber to a base pressure, and deposition of the ITO seed layer and the Co/Pt multilayer was reduced to less than ten seconds. Cyclability and recording performance of the conventional media is retained.
社団法人応用物理学会の論文
1997-01-30