Evaluation of Incoherent-Type Pupil Filter : Spatial Filter for Incoherent Stream

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概要

• 論文の詳細を見る

• A new imaging method using an incoherent type filter, spatial filter for incoherent stream (SFINCS) is evaluated by experiment. The experiment was done with an i-line NAO.57 projection lens. The experimental results show the excellent depth-of-focus (DOF) expanding effect of SFINCS for fine hole patterns with good exposure dose latitude and mask manufacturing error latitude even if multiple focus exposure (FLEX) is used.

• 社団法人応用物理学会の論文
• 1994-12-30

著者

• Shiraishi Naomasa

  1 St Designing Department Ic & Lcd Equipment Division Nikon Corporation

• MATSUMOTO Koichi

  2nd Optical Designing Department, NIKON Corporation

• HIRUKAWA Shigeru

  1 st Designing Department, IC & LCD Equipment Division, Nikon Corporation

• TAKEUCHI Yuichiro

  1 st Designing Department, IC & LCD Equipment Division, Nikon Corporation

• Matsumoto Koichi

  2nd Optical Designing Department Nikon Corporation

• Hirukawa Shigeru

  1 St Designing Department Ic & Lcd Equipment Division Nikon Corporation

• Takeuchi Yuichiro

  1 St Designing Department Ic & Lcd Equipment Division Nikon Corporation

関連論文

• A New Imaging Method with a Spatial Filter for Incoherent Stream
• Evaluation of Incoherent-Type Pupil Filter : Spatial Filter for Incoherent Stream

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