Observation of Surface Composition during ECR Discharge Cleaning in JFT-2M
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概要
- 論文の詳細を見る
Surface composition on a molybdenum sample has been observed during ECR discharge cleaning (ECR-DC) by Auger electron spectroscopy in JFT-2M. ECR-DC reduces oxygen levels to one-thrid of those before exposure within thirty minutes, and the molybdenum concentration increases up to a factor of three during ECR-DC. Carbon levels decrease once, then increase gradually. In the later phase Auger line shapes are similar to pure carbon. Sulfur, which appears under 120℃ baking, surfaces from the stainless steel of the chamber as a result of the baking, and is sputtered by plasmas and deposited on the sample.
- 社団法人応用物理学会の論文
- 1986-03-20
著者
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OHTSUKA Hideo
Department of Thermonuclear Fusion Research,Naka Fusion Research Establishment,Japan Atomic Energy R
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Ohtsuka Hideo
Department Of Thermonuclear Fusion Research Japan Atomic Energy Research Institute
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Ohtsuka Hideo
Department Of Materials Science And Engineering Japan Atomic Energy Research Institute
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MATSUZAKI Yoshimi
Department of Thermonuclear Fusion Research, Japan Atomic Energy Research Institute
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Matsuzaki Yoshimi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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