An Aluminum Liquid Metal Ion Source with Prolonged Lifetime Using a Sintered Boride Emitter
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概要
- 論文の詳細を見る
A field-emission liquid Alion source with a sintered boride emitter, such as TiB_2, BN-TiB_2 composite, has been built to prolong the utilization term of an aluminum ion beam emission. In this approach, a stable Al ion beam emission was successfully obtained for more than 100 hours without any recognizable degradation. Emission current fluctuation was less than ±1% over 1 hour for 10 μA source ion current without any feedback stabilization. Moreover, 20-30 μA/sr angular intensity at 5-10 μA source ion current, 17° emission half-angle at 10 μA source current, and a large source ion current of more than 1.5 mA were also observed.
- 社団法人応用物理学会の論文
- 1983-07-20
著者
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Torii Yasuhiro
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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YAMADA Hiroshi
Atsugi Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Yamada Hiroshi
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation