Optical Waveguide in GaAs by Drive-in Diffusion Technique

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概要

• 論文の詳細を見る

• This report describes a technique for forming a thin layer as an optical waveguide in GaAs by a diffusion process alone. The optical waveguide has been fabricated by drive-in diffusion technique using powder-like ZnAs_2 as the predeposition source. Since low-surface hole concentration and abrupt step profile are obtained therewith, this technique promises the possibility of forming low-loss waveguides for integrated optics through a comparatively simple process.

• 社団法人応用物理学会の論文
• 1983-02-20

著者

• Ohke Shigeaki

  The Institute Of Scientific And Industrial Research Osaka University

• Cho Yoshio

  The Institute Of Scientic And Industrial Research Osaka University

• MATSUO Yukito

  The Institute of Scientific and Industrial Research Osaka University

• IDA Yasuhisa

  Faculty of Engineering, Kansai University

• KUSUNOKI Akira

  The Institute of Scientific and Industrial Research, Osaka University

• Ida Yasuhisa

  Faculty Of Engineering Kansai University

• Kusunoki Akira

  The Institute Of Scientific And Industrial Research Osaka University

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