Microstructures and Hydrogen Bonding Environments of a-Si: H Films Prepared by RF Sputtering in Pure Hydrogen

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1983-02-20

著者

• Noda Mikio

  Aichi University Of Education

• ISHIDA Hiroyuki

  Aichi University of Education

• SHIMIZU Hideki

  Aichi University of Education

関連論文

• Microstructures and Hydrogen Bonding Environments of a-Si: H Films Prepared by RF Sputtering in Pure Hydrogen
• Microstructures and Hydrogen Bonding Environments of Sputter-Deposited a-Si:H Films
• International Co-operative Symposium on Environmental Education in Thailand and Japan

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