Semiconductor Field Ion Micrographs

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概要

• 論文の詳細を見る

• Using commercially available wafers, imaging of various semiconductor surfaces was attempted by field ion microscopy (FIM). High quality images were obtained for Si, Ge, GaAs and GaP.

• 社団法人応用物理学会の論文
• 1983-12-20

著者

• Jimbo Akiko

  The Institute For Solid State Physics The University Of Tokyo

• Sakata Toyo

  The Institute For Solid State Physics The University Of Tokyo

• SAKURAI Toshio

  Physics Department, The Pennsylvania State University

関連論文

• Semiconductor Field Ion Micrographs

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