Characteristics of Be-Si-Au Ternary Alloy Liquid Metal Ion Sources
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概要
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Be-Si-Au ternary alloy liquid metal ion sources have been fabricated and basic characteristics such as mass spectra, energy distribution and angular current intensity have been measured. It was observed that for Be and Si, doubly charged ions are dominant over singly charged ions and the angular current intensity for the doubly charged ions is about 20 and 11 μA/str for Be and Si, respectively, at an energy spread (FWHM) of 10 eV. The present ion source could be operated for about 100 hours and is important for maskless implantation of both p- and n-type dopants in GaAs.
- 社団法人応用物理学会の論文
- 1983-11-20
社団法人応用物理学会 | 論文
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