X-ray Diffraction Topographic Observation of Si Single Crystals Irradiated with 150 MeV Ni^<+9> and Cl^<+9> Ions

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概要

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• For Si single crystals irradiated with 150 MeV Ni^<+9> and Cl^<+9> ions, it was found by X-ray diffraction topographic observation that (1) two kinds of characteristic and systematic fringes can be seen in the irradiated area, (2) the surface of the specimen irradiated with Cl^<+9> was most damaged just behind the Al-mask of 34 μm thickness, rather than the directly irradiated area, and (3) the specimen is deformed after the irradiation and lattice strains are concentrated at the irradiation boundaries. The deformation and the strains were observed on the reverse surface of the irradiated crystal.

• 社団法人応用物理学会の論文
• 1983-11-20

著者

• Tomimitsu Hiroshi

  Department Of Physics Japan Atomic Energy Research Institute

関連論文

• X-ray Diffraction Topographic Observation of Si Single Crystals Irradiated with 150 MeV Ni^ and Cl^ Ions

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