Low Temperature Deposition of TaCN Films Using Pentakis (diethylamido) tantalum
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-01-15
著者
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Kim Ki-bum
Inter-university Semiconductor Research Center Division Of Materials Science And Engineering Seoul N
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Cho Sung-lae
Inter-university Semiconductor Research Center Division Of Materials Science And Engineering Seoul N
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Kim Do-heyoung
Division Of Applied Chemical Engineering College Of Engineering Chonnam National University
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JUN Gyu-Chang
Inter-University Semiconductor Research Center, Division of Materials Science and Engineering, Seoul
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SHIN Hyun-Kook
Ultra Pure Chemical, Inc.
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Shin Hyun-kook
Ultra Pure Chemical Inc.
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Jun Gyu-chang
Inter-university Semiconductor Research Center Division Of Materials Science And Engineering Seoul N