High Reliability of Ultrathin Improved SiN on Poly-Si
スポンサーリンク
概要
- 論文の詳細を見る
- 1989-12-20
著者
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Komiya Hideo
Vlsi Development Laboratories Ic Group Sharp Corporation
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MIYATAKE Hisakazu
VLSI Development Laboratories IC Group, SHARP Corporation
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IDE Shigeaki
VLSI Development Laboratories IC Group, SHARP Corporation
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OHSHIMA Masatoshi
VLSI Development Laboratories IC Group, SHARP Corporation