Lattice Distortion of Microcrystalline Cubic Boron Nitride Measured by X-Ray Diffraction

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概要

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• Cubic boron nitride (c-BN) film synthesized by bias sputtering was studied using X-ray diffraction. The diffraction profile analysis indicated that the c-BN film consisted of microcrystals with apparent crystal sizes of about 34±4Å. Furthermore, it was found that the lattice of microcrystals was distorted by elongation of over 1% toward the film surface direction. This variation could be caused by residual compressive stress lying in the film plane. The residual compressive stress was estimated to be of the order of 10^<11> dyne/cm^2 using elastic theory.

• 社団法人応用物理学会の論文
• 1997-09-15

著者

• Mieno Masahiro

  National Institute For Research In Inorganic Materials

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• Lattice Distortion of Microcrystalline Cubic Boron Nitride Measured by X-Ray Diffraction
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