Synchrotron Radiation Micromachining of Polymers to Produce High-Aspect-Ratio Microparts

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概要

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• Synchrotron radiation (SR) direct micromachining of polymers was developed and high-aspect-ratio microparts of polytetrafluoroethylene (PTFE) were made. The limitation of critical dependence on the photon flux was eliminated by processing PTFE at a temperature of 200-250℃, so that the process was greatly simplified and the aspect-ratios were improved with reducing the smallest surface detail to less than ten microns and achieving the largest structural height of one thousand microns. The decomposition mechanism was discussed with a comparison between the SR micromachining and laser ablation.

• 社団法人応用物理学会の論文
• 1996-02-01

著者

• Zhang Yanping

  Laboratory For Quantum Equipment Technology Sumitomo Heavy Industries Ltd.

• Katoh Takanori

  Laboratory For Quantum Equipment Technology Sumitomo Heavy Industries Ltd.

関連論文

• Synchrotron Radiation Micromachining of Polymers to Produce High-Aspect-Ratio Microparts

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