A Drying Method Using Naphthalene for Flexible Microgripper Fabrication

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概要

• 論文の詳細を見る

• A new technique for the microfabrication of a flexible microgripper is presented. In order to avoid sticking between the microgripper fingers due to capillary force, a drying method using naphthalene as a drying solvent (the naphthalene drying method) is proposed and demonstrated. Using this method, a new type of flexible microgripper was successfully fabricated without any sticking between tire fingers, The advantages of the naphthalene drying method include simplicity, compatibility with atmospheric pressure, and suitability to batch fabrication.

• 社団法人応用物理学会の論文
• 1996-11-01

著者

• SUZUKI Yoshihiko

  Optomechatronics R&D Department, Nikon Co.

• Irita Takeshi

  Optomechatronics Research And Development Department Nikon Corporation

• Suzuki Yoshihiko

  Optomechatronics Research And Development Department Nikon Corporation

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• A Drying Method Using Naphthalene for Flexible Microgripper Fabrication

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