Electrical Characteristics of WO_3-Based CO_2-Sensitive Solid-State Microsensor
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概要
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A WO_3-impregnated thin polymer across two closely spaced microelectrodes is employed as a solid-state CO_2 microsensor at 1 atm and room temperature. Its function is based on the WO_3 transformation to the conducting H_xWO_3 by intercalation of released protons from CO_2 equilibration in the polymer. The response to CO_2 concentrations is reversible and linear between 〜0-16% at 〜840 kΩ per 1% change over prolonged operations of 〜80- second switching time. A dependence on residual water in the polymer is detected but exerts no influence on the CO_2 response as long as the polymer is not entirely dried out by H_2O-free gas.
- 社団法人応用物理学会の論文
- 1993-09-15
著者
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Chao S
National Chiao‐tung Univ. Hsin-chu Twn
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Chao Shuchi
Department Of Electrophysics National Chiao-tung University
関連論文
- Fabrication and Characterization of IrO_2-Based Microsensors for Fast Detection of Carbon Dioxide
- Electrical Characteristics of CO_2-Sensitive Diode Based on WO_3 and IrO_2 for Microsensor Applications
- Electrical Characteristics of Glucose-Sensitive Diode Arrays Based on WO3 and IrO2 for Microsensor Applications
- Electrical Characteristics of WO_3-Based CO_2-Sensitive Solid-State Microsensor