Design and Fabrication of Highly Efficient Fan-Out Elements (<Special Section>OPTICAL COMPUTING 1)

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概要

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• This paper reports the calculation and fabrication of periodic phase structures for fan-out elements with a theoretical conversion efficiency close to 100% and perfect uniformity. We have measured an efficiency of 92% for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.

• 社団法人応用物理学会の論文
• 1990-07-20

著者

• Herzig H.

  Institute Of Microtechnology University Of Neuchatel

• PRONGUE D.

  Institute of Microtechnology, University of Neuchatel

• DANDLIKER R.

  Institute of Microtechnology, University of Neuchatel

• Prongue D.

  Institute Of Microtechnology University Of Neuchatel

• Dandliker R.

  Institute Of Microtechnology University Of Neuchatel

関連論文

• Design and Fabrication of Highly Efficient Fan-Out Elements (OPTICAL COMPUTING 1)

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