Optical Constants of a-Si_xC_<1-x>:H Alloy Films Deposited by Tetrode RF Sputtering
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概要
- 論文の詳細を見る
- 1990-07-20
著者
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Akimoto Makio
Department Of Electronics Faculty Of Engineering Tokai University
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Gekka Yasuo
Department Of Electronics Faculty Of Engineering Tokai University
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AKAIDA Yosinori
Department of Electronics, Faculty of Engineering, Tokai University
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Akaida Yosinori
Department Of Electronics Faculty Of Engineering Tokai University
関連論文
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- Optical Constants of a-Si_xC_:H Alloy Films Deposited by Tetrode RF Sputtering
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