Preparation of YBaCuO Films by Polarized Plasma Oxidation of Multilayered Films

概要

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YBaCuO superconducting thin films were prepared by oxidizing the multilayered thin films composed of Ba, Y_2O_3 and Cu in the oxygen-helium plasma. The superconductive properties of these films were found to be strongly dependent on the DC bias applied to the substrate during plasma oxidation. The negative bias increases the c-axis-preferred orientation, whereas the oxidation proceeds more easily under the positive bias. Therefore, the combination of both negative and positive bias is of great advantage to the preparation of high-quality superconducting thin films.
社団法人応用物理学会の論文
1990-12-20