Investigation on the Microstructure of Hydrogenated Amorphous Carbon Films by Electron Energy-Loss Spectroscopy

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概要

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• Structure characterization of the hydrogenated amorphous carbon (a-C:H) films prepared by plasma CVD has been carried out by electron energy-loss spectroscopy (EELS). The EELS data are successfully resolved to the bulk contributions and the surface ones by using the curve fitting. The EELS spectra are discussed on the basis of the energy-loss function of graphite. The annealing may cause the increase in number of small linear or chainlike clusters of fused sixfold carbon rings rather than growth of their compact clusters.

• 社団法人応用物理学会の論文
• 1990-11-20

著者

• Okuyama Naoki

  The University Of Electro-communications

• Yamazaki Hisashi

  The University Of Electro-communications

• KATASHIMA Mitsuhiro

  The University of Electro-Communications

• BEKKU Ichiro

  The University of Electro-Communications

• MIHARA Masahiro

  The University of Electro-Communications

関連論文

• Electromigration of In Ultrathin Film on Si(111)
• Electronic Properties of Cs-Covered Surfaces of Graphite (0001)
• Investigation on the Microstructure of Hydrogenated Amorphous Carbon Films by Electron Energy-Loss Spectroscopy

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