Void Formation and Its Effect on Dopant Diffusion and Carrier Activation in Si-Implanted GaAs
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-11-20
著者
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Chen Samuel
Corporate Research Laboratories Eastman Kodak Company
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LEE S.-Tong
Corporate Research Laboratories, Eastman Kodak Company
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BRAUNSTEIN G.
Corporate Research Laboratories, Eastman Kodak Company
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KO K.-Y.
Corporate Research Laboratories, Eastman Kodak Company
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ZHENG L.
Corporate Research Laboratories, Eastman Kodak Company
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TAN T.
Corporate Research Laboratories, Eastman Kodak Company
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Ko K.-y.
Corporate Research Laboratories Eastman Kodak Company
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Lee S.-tong
Corporate Research Laboratories Eastman Kodak Company
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Braunstein G.
Corporate Research Laboratories Eastman Kodak Company
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Tan T.
Corporate Research Laboratories Eastman Kodak Company
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Zheng L.
Corporate Research Laboratories Eastman Kodak Company