Electron-Beam-Induced Structuring of Composite Oxides by means of Dipping Pyrolysis of Metal Naphthenate Films

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概要

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• We have found that metal naphthenate thin films reacted with an energized electron beam of 30 keV and that the structured metal naphthenate in the submicron range could be prepared through the development of electron-irradiated samples using the organic solvent, toluene. The electron beam sensitivity of the metal naphthenate films was about 2 × 10^<-3> C/cm^2, which showed higher sensitivity than that of the electron beam induced chemical vapour deposition but lower than that of PMMA resist. After the heat treatment at 450℃ for 20 minutes, submicron patterns of the composite oxide, consisting of a few kinds of oxides, were prepared.

• 社団法人応用物理学会の論文
• 1992-08-01

著者

• Okamura S

  Yamaguchi College Science University Of Tokyo

• MORI Katsumi

  Yamaguchi College, Science University of Tokyo

• OKAMURA Soichiro

  Yamaguchi College, Science University of Tokyo

• Okamura Soichiro

  Yamaguchi College Science University Of Tokyo

• Mori Katsumi

  Yamaguchi College Science University Of Tokyo

関連論文

• Fabrication of Ferroelectric Bi_4Ti_3O_ Thin Films by Dipping Pyrolysis of Metal Naphthenates and Micropatterns by an Electron Beam ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Electron-Beam-Induced Structuring of Composite Oxides by means of Dipping Pyrolysis of Metal Naphthenate Films

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