Application of Copper-Decoration Method to Characterize As-Grown Czochralski-Silicon
スポンサーリンク
概要
- 論文の詳細を見る
- 1992-04-15
著者
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Esaka Hisao
Electronics Research Laboratories Nippon Steel Corporation
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YAMAUCHI Tsuyoshi
Electronics Research Laboratories, Nippon Steel Corporation
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TSUMORI Yasuo
Electronics Research Laboratories, Nippon Steel Corporation
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NAKASHIZU Tsuneo
Electronics Research Laboratories, Nippon Steel Corporation
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TAKAO Shigeyoshi
Electronics Research Laboratories, Nippon Steel Corporation
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SHINOYAMA Seiji
Electronics Research Laboratories, Nippon Steel Corporation