Microscopically Smooth Surface of Pulse Laser Deposited YBa_2Cu_3O_7 Film Shown by Grazing Incidence X-Ray Reflectivity
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概要
- 論文の詳細を見る
Surface and film/substrate interface roughness of YBa_2Cu_3O_7 films deposited on MgO(100) and SrTiO_3(100) by rapid sequential pulse laser deposition has been determined from X-ray reflectivity data. The film on MgO had the averae roughness of 26.2 Å at the film/substrate interface and roughness of one unit cell order at the surface. On the other hand, the film on SrTiO_3 had approximately the average roughness of 40 Å at both the surface and film/substrate interface. Obviouusly, the surface of the film on MgO is smoother than that on STO. The rough surface of the film on SrTiO_3 is considered to be partly due to the growth of the film along the steps of the sutbstrate, while the film on MgO grows without the influence of the steps on the substrate.
- 社団法人応用物理学会の論文
- 1994-08-01
著者
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WATANABE Yukio
Research & Development Center, Toshiba Corporation
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Watanabe Yukio
Research Center Mitsubishi Kasei Corporation
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Asami H
Research Center Mitsubishi Kasei Corporation
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ASAMI Harumi
Research Center, Mitsubishi Kasei Corporation
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- Microscopically Smooth Surface of Pulse Laser Deposited YBa_2Cu_3O_7 Film Shown by Grazing Incidence X-Ray Reflectivity