Role of PtO Electrode in Fatigue in Pb(Zr,Ti)O_3 Films

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概要

• 論文の詳細を見る

• Two different structures of Pt/Pb(Zr,Ti)O_3 (PZT)/Pt and PtO/PZT/PtO/Pt capacitors were fabricated by rf magnetron sputtering followed by rapid thermal annealing (RTA) in a N_2 atmosphere. The ferroelectric properties of these two capacitors were compared mainly in terms of fatigue. The reduction of PtO to Pt after RTA was observed by X-ray diffraction (XRD) and this resulted in degradation-free capacitors for 5.0×10^<11> cycles of polarization reversals. The Pt/PZT/Pt capacitor, however, showed a sharp decrease in polarization in the range of 10^8 read and write cycles. It is thought that the improvement was due to compensation for oxygen vacancies in PZT, which are the source of fatigue during service, by oxygen atoms reduced and separated from the PtO layer that then diffuse to the dielectric layer to neutralize the vacancies.

• 社団法人応用物理学会の論文
• 1999-08-01

著者

• Lee Byung

  Faculty Of New Materials Engineering Chonbuk National University

• LEE Jeong

  Faculty of New Materials Engineering, Chonbuk National University

• Lee Jeong

  Faculty Of New Materials Engineering Chonbuk National University

関連論文

• Role of PtO Electrode in Fatigue in Pb(Zr,Ti)O_3 Films
• Preparation of Pt/Ru Bilayers and Their Application to the Capacitor of Memory Devices

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