Characterization of Lead-Zirconate-Titanate (PZT) Films Formed by Photo-Decomposition of Metal Organic Polymer

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概要

• 論文の詳細を見る

• The characteristics of lead-zirconate-titanate (PZT) films formed by photo-assisted decomposition of metal organic sol-gel polymer at low temperatures using a 172 nm excimer lamp is reported. The thickness of the films formed on Si was determined using ellipsometry while their composition was determined by electron probe X-ray microanalysis. Current-voltage measurements showed that the leakage current densities in the PZT films were over an order of magnitude less than those obtained in films prepared by conventional thermal processing.

• 社団法人応用物理学会の論文
• 1999-04-01

著者

• Zhang J‐y

  Electronic And Electrical Engineering University College London Torrington Place

• Boyd I

  Electronic And Electrical Engineering University College London Torrington Place

• ZHANG Jun-Ying

  Electronic and Electrical Engineering, University College London, Torrington Place

• BOYD Ian

  Electronic and Electrical Engineering, University College London, Torrington Place

• Boyd Ian

  Electronic And Electrical Engineering University College London Torrington Place

• Zhang Jun-ying

  Electronic And Electrical Engineering University College London Torrington Place

関連論文

• Characterization of Lead-Zirconate-Titanate (PZT) Films Formed by Photo-Decomposition of Metal Organic Polymer
• Formation of High Quality Tantalum Oxide Thin Films at 400℃ by 172nm Radiation

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