Detection Mechanism of Spontaneous Polarization in Ferroelectric Thin Films Using Electrostatic Force Microscopy

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概要

• 論文の詳細を見る

• Mechanism on the detection of spontaneous polarization in a Pb(Zr_<0.5>Ti_<0.5>)O_3 (PZT) film using contact mode of electrostatic force microscopy (EFM) is investigated. Theoretical calculations are performed on deflections induced by electrostatic force (u^e_ω) between the tip and the sample and electromechanical vibrations (u^p_ω) of the ferroelectric materials, respectively. From the calculation, u^e_ω and u^p_ω are 3.73×10^<-9> and 1.77×10^<-13> m. Enhanced mode of EFM shows the complete cancellation of the EFM image induced by the electrostatic force between the tip and the film through controlling dc voltage. Hence, electrostatic force effect is a main contributor on the detection mechanism of spontaneous polarization using EFM in contact mode.

• 社団法人応用物理学会の論文
• 1999-03-01

著者

• Jeon Jong

  Samsung Advanced Institute Of Technology Micro Systems Lab.

• Lee Kyongmi

  Samsung Advanced Institute Of Technology Micro Systems Lab.

• SHIN Hyunjung

  Samsung Advanced Institute of Technology, Micro Systems Lab.

• MOON Won-Kyu

  Pohang University of Science and Technology, Department of Mechanical Engineering

• PAK Y.

  Samsung Advanced Institute of Technology, Micro Systems Lab.

• Shin Hyunjung

  Samsung Advanced Institute Of Technology Micro Systems Lab.

• Moon Won-kyu

  Pohang University Of Science And Technology Department Of Mechanical Engineering

• Pak Y.

  Samsung Advanced Institute Of Technology Micro Systems Lab.

関連論文

• Detection Mechanism of Spontaneous Polarization in Ferroelectric Thin Films Using Electrostatic Force Microscopy

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