Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures : Micro/nanofabrication and Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-30
著者
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Bacher W.
Application Of The Liga Process In Fabrication Of Three-dimensional Mechanical Microstructures
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Schomburg W.k.
Application Of The Liga Process In Fabrication Of Three-dimensional Mechanical Microstructures
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BLEY P.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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MENZ W.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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FEIT K.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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HARMENING M.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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HEIN H.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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MOHR J.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures
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STARK W.
Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures