Linewidth Measurement by a New Scanning Tunneling Microscope : Inspection and Testing
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-12-30
著者
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YAMADA Hirofumi
Quntum Metrology Department, National Research Laboratory of Metrology
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FUJII Toru
Quntum Metrology Department, National Research Laboratory of Metrology
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NAKAYAMA Kan
Quntum Metrology Department, National Research Laboratory of Metrology