Helios : A Compact Synchrotron for X-Ray Lithography : Lithography Technology
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-12-30
著者
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Wilson M.n.
Synchrotron Group Oxford Instruments Ltd.
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Jordan A.r.
Synchrotron Group Oxford Instruments Ltd.
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Anderson R.j.
Synchrotron Group Oxford Instruments Ltd.
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Smith A.i.c.
Synchrotron Group Oxford Instruments Ltd.
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Andrews D.e.
Synchrotron Group Oxford Instruments Ltd.
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Townsend M.c.
Synchrotron Group Oxford Instruments Ltd.
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KEMPSON V.C.
Synchrotron Group, Oxford Instruments Ltd.
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WILSON M.N.
Oxford Instruments Ltd, Osney Mead, Oxford
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SMITH A.I.C.
Oxford Instruments Ltd, Osney Mead, Oxford
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KEMPSON V.C.
Oxford Instruments Ltd, Osney Mead, Oxford
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PURVIS A.L.
Oxford Instruments Ltd, Osney Mead, Oxford
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ANDERSON R.J.
Oxford Instruments Ltd, Osney Mead, Oxford
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TOWNSEND M.C.
Oxford Instruments Limited, Synchrotron Division, Osney Mead, Oxford.
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JORDAN A.R.
Oxford Instruments Limited, Synchrotron Division, Osney Mead, Oxford.
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LOBEL R.C.
Oxford Instruments Limited, Synchrotron Division, Osney Mead, Oxford.
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BHUTTA A.S.
Oxford Instruments Limited, Synchrotron Division, Osney Mead, Oxford.
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ANDREWS D.E.
Oxford Instruments Limited, Synchrotron Division, Osney Mead, Oxford.
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Purvis A.l.
Synchrotron Group Oxford Instruments Ltd.
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Kempson V.c.
Synchrotron Group Oxford Instruments Ltd.
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Lobel R.c.
Oxford Instruments Limited Synchrotron Division Osney Mead Oxford.
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Bhutta A.s.
Oxford Instruments Limited Synchrotron Division Osney Mead Oxford.
関連論文
- HELIOS 1-Transportation and Reinstallation at IBM's East Fishkill Facility : X-Ray Lithography
- Update on the Compact Synchrotron X-Ray Source Helios : Lithography Technology
- Helios : A Compact Synchrotron for X-Ray Lithography : Lithography Technology