Characterisation of Nitrides Prepared by Ion Beam Enhanced Deposition of Aluminium, Silicon and Titanium

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-06-20

著者

• Kohno Akio

  The Institute Of Physical And Chemical Research

• Kohno Akio

  The Institute Of Physical And Chemical Research (riken)

• FATKIN James

  LONZA A. G.

• KANEKAMA Norio

  The Institute of Physical and Chemical Research (RIKEN)

• Kanekama Norio

  The Institute Of Physical And Chemical Research

関連論文

• Frictional Properties of Nickel and Copper Implanted Low Carbon Steel Plates
• Characterisation of Nitrides Prepared by Ion Beam Enhanced Deposition of Aluminium, Silicon and Titanium
• Short Range Order Structure of Amorphous Boron Prepared by Various Methods
• Crystallization of Vacuum-Deposited Indium Antimonide Films by the Electron Beam Zone-Melting Process

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