Theory of the Hollow Cathode Glow Discharge
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概要
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A theory of the hollow cathode glow discharge based on the two-temperature electron model is developed. The following two interdependent mechanisms are consistently taken into account: the creation of ions and excited atoms due to electron collisions in the discharge and the emission of secondary electrons on the cathode surface due to ions and ultraviolet photons. Trapped electrons in the hollow are also considered. Numerical calculations are made for helium gas in a cylindrical hollow cathode whose inner diameter and length are 10 and 32 mm, respectively, on the basis of a onedimensional steady state model. Voltage-current relations are obtained at gas pressures of 0.13, 0.27 and 0.40 kPa. Population densities of 64 excited atomic levels are determined as a function of the radial distance r as well as the densities of the ions and electrons.
- 社団法人応用物理学会の論文
- 1987-02-20
著者
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Hashiguchi Seishiro
Division Of Basic Science Faculty Of Engineering And Design Kyoto Institute Of Technology
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HASIKUNI Mitugi
Division of Basic Science, Faculty of Engineering and Design, Kyoto Institute of Technology
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Hasikuni Mitugi
Division Of Basic Science Faculty Of Engineering And Design Kyoto Institute Of Technology
関連論文
- Calculations for the Distribution Function of Energetic Electrons in a Helium Hollow Cathode Glow Discharge with the Monte Carlo Method : Nuclear Science, Plasmas and Electric Discharges
- The Monte Carlo Calculations for the Distribution Function of Energetic Electrons in a Plane-Parallel Hollow Cathode
- Theory of the Hollow Cathode Glow Discharge