Scaled LOCOS Processes with Reduced Narrow Width Effects
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-07-20
著者
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Itoh Mamoru
Texas Instruments Japan Ltd.
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Smayling Michael
Advanced Process Development Texas Instruments Inc.
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Baglee David
Advanced Process Development, Texas Instruments Inc.
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Duane Michael
Advanced Process Development, Texas Instruments Inc.
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Baglee David
Advanced Process Development Texas Instruments Inc.
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Duane Michael
Advanced Process Development Texas Instruments Inc.