Electromechanical Coupling Constants of Surface Acoustic Waves on Lithium Niobate Covered with Silicon Dioxide

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概要

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• The coupling constant of 128°-rotated y-cut x-propagating LiNbO_3 covered with SiO_2 was measured. SiO_2 was deposited on LiNbO_3 before forming SAW transducers, and was used as a nonpiezoelectric film to control the coupling constant of the piezoelectric substrate. The coupling constant decreased as the film became thicker. The admittance of SAW transducers formed on the film was then measured, and the coupling constant was derived from the measured admittance. The measured coupling constant was 0.047, 0.038, 0.034 and 0.029 when the ratio of the film thickness to the SAW wavelength was 0.005, 0.01, 0.015 and 0.02, respectively. The coupling constant of the LiNbO_3 substrate without the SiO_2 film was 0.057, which agrees with the value of 0.056 reported previously.

• 社団法人応用物理学会の論文
• 1983-09-20

著者

• Komatsu Yasutoshi

  Research Center Sony Corp.

• HIRABAYASHI Makoto

  Research Center, Sony Corp.

• KANAMARU Masaji

  Audio Technology Center, Sony Corp.

• Kanamaru Masaji

  Audio Technology Center Sony Corp.

• Hirabayashi Makoto

  Research Center Sony Corp.

関連論文

• Electromechanical Coupling Constants of Surface Acoustic Waves on Lithium Niobate Covered with Silicon Dioxide
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