Low-Temperature Deposition of SrRuO_3 Thin Film Prepared by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-02-15
著者
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SAITO Keisuke
Department of Urology, Teikyo University School of Medicine
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OKUDA Norikazu
Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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Funakubo Hiroshi
Application Laboratory Analytical Department Philips Japan Ltd.
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Okuda Norikazu
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Okuda Norikazu
Department Of Innovative And Engineering Materials Interdisciplinary Graduate School Of Science And
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Saito Keisuke
Department Of Innovative And Engineering Materials Interdisciplinary Graduate School Of Science And
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- Low-Temperature Deposition of SrRuO_3 Thin Film Prepared by Metalorganic Chemical Vapor Deposition
- Control of Refractive Index of Fluorinated Polyimide by Proton Beam Irradiation