Effects of Resist Thickness and Substrate Reflectance on Critical Dimension Bias of Isolated-Dense Pattern
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-02-15
著者
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Kim Hyoung
Hyundai Electronics Ind. Co. Semiconductor Advanced Research Division
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Kim Myoung
Hyundai Electronics Ind. Co. Semiconductor Advanced Research Division
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Kim Hyeong
Hyundai Electronics Ind. Co. Semiconductor Advanced Research Division
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Baik Ki
Hyundai Electronics Ind. Co. Semiconductor Advanced Research Division