An Open-Cavity Electron Cyclotron Resonance Plasma/Ion Source
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-15
著者
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HU Yuan
Department of Engineering and System Science, National Tsing-Hua University
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LIN Tsang-Lang
Department of Engineering and System Science, National Tsing-Hua University
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Lin T‐l
National Tsing Hwa Univ. Hsinchu Twn
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Hu Yuan
Department Of Engineering And System Science National Tsing-hua University
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Lin Tsang-lang
Department Of Engineering And System Science National Tsing Hua University
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NING Fung-Truen
Department of Engineering and System Science, National Tsing-Hua University
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Hu Y
National Tsing‐hua Univ. Hsinchu Twn
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Ning Fung-truen
Department Of Engineering And System Science National Tsing-hua University
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- Experimental Characterization of an Inductively Coupled Plasma Discharge Using a Shape-Adjustable Coil
- Simulation Study of Reflective-Type Carbon Nanotube Field Emission Display