Thermally Induced Changes in the Hydrogen Microstructure of Amorphous Hydrogenated Silicon Films, Analyzed Using In Situ Real Time Infrared Spectroscopy
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-15
著者
-
Abelson J.r.
Coordinated Science Laboratory University Of Illinois At Urbana-champaign
-
Keudell A.Von
Coordinated Science Laboratory, University of Illinois at Urbana-Champaign
-
Keudell A.von
Coordinated Science Laboratory University Of Illinois At Urbana-champaign