Deposition of (100) and (110) Textured Diamond Films on Aluminum Nitride Ceramics via Hot Filament Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Textured (100) and (110) diamond films were successfully grown on aluminum nitride ceramics at different substrate temperatures via hot filament chemical vapor deposition (HFCVD). The surface morphology and the crystallographic properties of the two textured films were characterized by scanning electron microscopy and X-ray diffraction. The highest ratios of the diffraction intensity, I_<(400)>/I_<(111)> (about 5.8) of (100) textured films and I_<(220)>/I_<(111)> (about 2.2) of (110) textured films, are greatly larger than that of randomly oriented diamond films (0.08 and 0.25). The optimized conditions of textured films on AlN substrates were obtained. The experimental results showed that the substrate temperature played an important role in the texture types of diamond films. The growth mechanism of the two texture films is discussed in detail.
- 社団法人応用物理学会の論文
- 1999-03-15
著者
-
LIAO Yuan
Department of Chemistry, North Carolina State University
-
Liao Yuan
Department Of Physics University Of Science And Technology Of China
-
SHANG Naigui
Department of Physics, University of Science and Technology of China
-
FANG Rongchuan
Department of Physics, University of Science and Technology of China
-
CUI Jingbiao
Department of Physics, University of Science and Technology of China
-
Liao Yuan
Department Of Chemistry North Carolina State University
-
Fang Rongchuan
Department Of Physics University Of Science And Technology Of China
-
Shang Naigui
Department Of Physics University Of Science And Technology Of China
-
Cui Jingbiao
Department Of Physics University Of Science And Technology Of China:structure Research Laboratory Un
関連論文
- The Effect of Phenyl Substituents on the Release Rates of Esterase-Sensitive Coumarin-Based Prodrugs
- Deposition of (100) and (110) Textured Diamond Films on Aluminum Nitride Ceramics via Hot Filament Chemical Vapor Deposition