High-Performance InAs Quantum Well based Corbino Magnetoresistive Sensors on Germanium Substrates
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概要
- 論文の詳細を見る
High-quality InAs/Al_<0.2>Ga_<0.8>Sb quantum well structures were grown on Germanium substrates by molecular beam epitaxy (MBE). Electron mobilities of 27,000cm^2/Vs for sheet concentrations of n_s = 1.8×10^<12> cm^<-2> were routinely achieved at room temperature for undoped InAs/Al_<0.2>Ga_<0.8>Sb quantum well structures on Germanium substrates. We developed a simple processing technology for the fabrication of Corbino magnetoresistive devices. Excellent current sensitivities of 195 Ω/T and voltage sensitivities of 2.35 T^<-1> at a magnetic field of 0.15 T were measured for Corbino shaped magnetoresistors on Germanium substrate at room temperature. This sensing performance is comparable to that obtained by identical sensors on GaAs substrate.
- 社団法人応用物理学会の論文
- 1999-03-15
著者
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De Boeck
Imec Vzw
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Borghs Gustaaf
Imec Vzw
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BEHET Markus
IMEC vzw
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MIJLEMANS Paul
Union Miniere, Electro-Optic Materials
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Mijlemans Paul
Union Miniere Electro-optic Materials
関連論文
- Molecular Beam Epitaxial Growth of Bulk AlAs_Sb_ and AlAs_Sb_/InAs Superlattices on Lattice-Matched InAs Substrates
- High-Performance InAs Quantum Well based Corbino Magnetoresistive Sensors on Germanium Substrates