Plasma Parameter Measurement by the Impedance of a Coil Inductively Coupled with a Plasma

スポンサーリンク

概要

• 論文の詳細を見る

• We have developed a method to measure plasma parameters in a discharge by analyzing the impedance of a search coil wound around a discharge tube. This technique is based on the diamagnetic characteristic of the plasma. When a high-frequency current passes through the search coil, a diamagnetic current is induced inside the plasma, and the energy to the search coil is dissipated by Joule loss due to the resistivity of the plasma. As a result, the impedance of the search coil varies depending on plasma properties. The relationship among plasma parameters, magnetic field and impedance of the search coil is derived from Maxwell's equations and generalized Ohm's law. Thus, plasma parameters can be determined from the variation of the impedance. The present diagnostic method was applied to measure electron density and electron temperature in a mercury-argon plasma at a pressure of 2.5 Torr.

• 社団法人応用物理学会の論文
• 1999-01-15

著者

• KANDO Masashi

  Department of Electrical Engineering, Nagoya University

• Kando Masashi

  Department Of Electrical Engineering Nagoya University

• MISONO Katsuhide

  Graduate School of Electronic Science and Technology, Shizuoka University

• VERDEYEN Joseph

  Electrical and Computer Engineering, University of Illinois at Urbana-Champaign

• Kando Masashi

  Department Of Electric And Electronic Engineering Shizuoka University

関連論文

• Nonlinear Interaction of High Frequency Electromagnetic Field with a Nonuniform Plasma
• Instability in a Weakly Ionized Afterglow Plasma with a Magnetic Field in a Short Tube
• Probe diagnostics in high pressure high density microwave plasma
• Plasma Parameter Measurement by the Impedance of a Coil Inductively Coupled with a Plasma
• Excitation of Azimuthally Propagating Ion-Cyclotron Drift Waves in Large Magnetized Plasma : Nuclear Science, Plasmas and Electric Discharges
• Ion Cyclotron Drift Waves in Plasmas with Controlled Radial Density Distributions
• High-pressure Microwave Discharges in a Compact Quartz Tube for an Electrodeless High Intensity Discharge Lamp
• Anomalous Diffusion in an Axially Decaying Plasma
• The Relation between the Oscillation and the Perpendicular Diffusion in a Field-Free Magneto-Plasma
• Diffusion Measurement in an Axially Decaying Magnetized Plasma with Oscillations
• Diffusion Waves in Low Density Plasmas
• Anomalous Diffusion of a C_3 Plasma with Oscillations

もっと見る 閉じる

スポンサーリンク